NANO-TIP RESEARCH FOR UPDATING THE SURFACE OF POLYMER BY THE METHOD OF DYNAMIC POWER LITHOGRAPHY

A. . Golubok, A. . Pinaev, A. . Stovpyaga


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Abstract

The optimization of an oscillatory system of SPM "NanoEducator" sensor with the purpose of the maximal space resolution achievement in the semi-contact dynamic nanolithography modes has been made. The effective parameters of cantilever sizes and probe tips for different SPM modes have been obtained. The surface nanostructures on the polycarbonate samples were received according to the set of pattern using the dynamic nanolithography method.


Keywords: scanning force microscope, lithography
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