DEFECTS INVESTIGATION OF SI/SIO2 SYSTEM FORCED BY LASER IRRADIATION

O. V. Kuznetsova, Q. T. Pham, R. . Khalestkiy


Read the full article 

Abstract

Investigation results of laser irradiation influence on structural properties of silicon-thermal oxide system are shown in this article.


Keywords: laser irradiation, silicon nanocluster, Si/SiO2 system

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License
Copyright 2001-2018 ©
Scientific and Technical Journal
of Information Technologies, Mechanics and Optics.
All rights reserved.

Яндекс.Метрика