DEFECTS INVESTIGATION OF SI/SIO2 SYSTEM FORCED BY LASER IRRADIATION

O. V. Kuznetsova, Q. T. Pham, R. . Khalestkiy


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Abstract

Investigation results of laser irradiation influence on structural properties of silicon-thermal oxide system are shown in this article.


Keywords: laser irradiation, silicon nanocluster, Si/SiO2 system
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