AL2O3 NANOSTRUCTURED FILMS CREATION BY METHOD OF ELECTROCHEMICAL ANODIZING

M. V. Zhukov, V. . Levichev


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Abstract

Thin oxide films of aluminum were investigated by method of scanning probe microscopy. Electrical parameters of anodizing process were studied on different samples of aluminum to get the most structured oxide. The comparison of surface structure topography was held on oxide films by NTegra scanning probe microscope.


Keywords: aluminum oxide, array of structured porous, thin films, nano-sized porous, aluminum anodizing
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