PRECISE MANIPULATION OF MICRO- AND NANOPARTICLES UNDER THE ELECTRON BEAM

A. . Denisyuk, P. . Komissarenko


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Abstract

The paper deals with a new method of particle manipulation based on electrostatic interaction between objects charging under the beam of a scanning electron microscope. The method gives the possibility for well-controlled picking up, transportation and dropping off micro- and nanoparticles and also for visualization of the process and manipulation result in real time on electron images. Precise manipulation of Al2O3, WO3 and tungsten particles with sizes ranging from 50 nm to 1 micron by a metallic tip charged under the electron beam is experimentally demonstrated. A theoretical model is created, based on the assumption that the dielectrophoretic force by the charged metallic tip pulls the particles whereas the Van-der-Waals force retains them on a substrate or on other particles. The given method can be used in micro- and nanoparticle assembly, fabrication of specialized probes for scanning probe microscopes and estimation of particle-substrate and particle-particle interaction forces.


Keywords: electron microscopy, micro- and nanoparticle manipulation, dielectrophoresis
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