THIN METAL FILMS STRUCTURE RESEARCH AFTER FEMTOSECOND LASER RECORDING
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Thermochemical method of thin Cr films modification by laser pulses of super short width is considered.
Illumination modes till exhalation are examined. Illuminated areas in the atmosphere and vacuum steady for
etching are obtained. Structural and chemical composition of illuminated areas is determined. The most
technological mode of Cr modification is selected increasing the method resolution.