NANOWHISKER GROWTH UNDER ELECTRON BEAM IMPACT: MATHEMATICAL MODEL

S. A. Chivilikhin, A. . Golubok, I. . Mukhin


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Abstract

 

We present mathematical model of nanowhisker growth at the conductor surface in the vacuum chamber of
scanning electron microscope under focused electron beam impact. Carbon ions with positive charge come out
from chamber surface and are captured by electron beam field. Ions move along electron beam and subside at
nanowhisker surface. This process provides nanowhisker growth. In that model electrical field and beam
potential are approximated by electrical field and potential of uniformly charged wire. For that simplification
Vlasov equation is written, that gives equation of nanowhisker surface movement. By numerical methods we
simulated and visualized the process of nanowhisker growth. Computing program builds dynamic grid, which
simulates growing whisker – dynamic growth in real time. Obtained results go well with experimental data.

Keywords: nanowhisker, mathematical model of growth, equation of surface movement
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