RESEARCH OF DYNAMIC FORCE LITHOGRAPHY MODE IN SYSTEM "METAL-POLYMER"

A. . Pinaev, A. . Stovpyaga


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Abstract

 

The simple and inexpensive technology of conducting structures creation with the lowered dimension on the
basis of dynamic force lithograph (DFL) method application to system «metal – polymer» is offered. Results of
local DFL – modifications of polycarbonate surface and polycarbonate covered with aluminum film (Al) with
tungsten nanoprobes and radius about 100 nanometers are given. Modification results are analyzed by means of
scanning probe and raster electronic microscopes.

Keywords: scanning force microscope, lithography.
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