DIFFERENTIAL CAPACITIVE DISPLACEMENT PICKUP WITH ADDITIONAL OUTPUT FOR THE GAP CHANGE DATA

R. . Lyukshonkov, N. . Moiseev


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Abstract

Differential capacitive displacement pickup block diagram of a micromechanical gyroscope moving mass is considered. The problem of the gap between pickup electrodes and moving mass changes under the external influence is analyzed. The distinguishing feature of the pickup diagram is an additional signal which compensates changes of the gap. Experimental results of the displacement pickup model are presented.


Keywords: differential capacitive displacement pickup, micromechanical inertial sensors, external influence compensation, gap between electrodes.
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