ON TUNGSTEN PROBES STABILITY UNDER SPM OPERATION IN THE MODES OF DYNAMIC FORCE LITHOGRAPHY AND NANOINDENTATION

A. . Golubok, A. . Pinaev, A. . Feklistov, S. A. Chivilikhin


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Abstract

Stability of tungsten probe under the influence of longitudinal mechanical stress arising while scanning probe microscope operation in the modes of dynamic force lithography and nanoindentation is studied. Within the proposed theoretical model the expression for critical force of longitudinal compression is obtained, which exceeding leads to stability loss and probe bending. Experimental data obtained in the SPM with force interaction piezoresonance sensor, showing stable and unstable behavior of the W probe for NI and DSL surface of polycarbonate.


Keywords: scanning probe microscopy, dynamic force lithography, nanoindentation, piezoresonance probe sensor.
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