CAPACITIVE POSITION SENSOR FOR PLANAR ELECTRIC DRIVE
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Planar electric drive based on planar linear motor found its application in the fast accurate planar (XY) motion tasks. Operation principle of the capacitor position sensor for the planar electric drive as well as methods of the signal processing are presented, developed prototype of the capacitive position sensor integrated into the armature of the planar linear motor is given. Results demonstrate the accuracy and resolution of the sensor.