POROUS SILICON THIN FILM EFFECT ON SPECTRAL CHARACTERISTIC OF SILICON PHOTODIODE

V. . Sokolov, . Huynh Cong Tu


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Abstract

Effect of porous silicon thin film formed by anode electrochemical etching of p-type area on spectral characteristic of silicon photodiode has been examined. It is shown that generated porous silicon layer results in significant increase of spectral sensitivity in the whole spectrum. Time modification of photodiode spectral sensitivity has been observed.


Keywords: porous silicon, spectral characteristic, photodiode.
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