RESEARCH OF THE MEMS GYRO DYNAMICS UNDER THE MECHANICAL IMPACTS

M. I. Evstifeev , D. P. Eliseev, A. . Kovalev, D. Rozentsvein


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Abstract

Investigation results of the MEMS gyro sensing element dynamics are given. The dependence of device characteristics due to the inertial impacts and the value of instrumental errors, including static and dynamic unbalance and unequal stiffness are shown. Experimental tests of MEMS gyro on the centrifuge and the vibrating table have been executed and obtained analytical dependences have been confirmed.


Keywords: micromechanical gyroscope, elastic suspension, unbalance, unequal stiffness, vibration.
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