doi: 10.17586/2226-1494-2017-17-2-256-262


EXCIMER LASER PULSE ENERGY METER BASED ON PHOTOELECTRIC RESPONSE OF INDIUM-TIN OXIDE FILMS

I. K. Meshkovsky, S. A. Plyastsov


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For citation: Meshkovskiy I.K., Plyastsov S.A. Excimer laser pulse energy meter based on photoelectric response of indium-tin oxide films. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2017, vol. 17, no. 2, pp. 256–262 (in Russian). doi: 10.17586/2226-1494-2017-17-2-256-262

Abstract

The paper deals with the problems of excimer laser pulse energy measurements. The goal of the current work is to research and develop the construction and characteristics of laser energy meter based on the photoelectric films of indium-tin oxide. Photoelectric voltage linearly depends on the laser pulse energy. We propose the construction and electric scheme of the energy meter. Comparison of the measurement results of photoelectric energy meter and pyroelectric energy meter is carried out. It is shown that the measurement error of photoelectric energy meter does not exceed the one for pyroelectric energy meter. Also it is found that photoelectric energy meter has several advantages: mechanical shock has no influence on the energy meter results, energy meter requires no zero level calibration, sensor temperature dependence is less than for pyroelectric meter. We measure the work energy diapason for the meter sensor element. It is shown that the surface degradation occurs under the irradiation with energy density equal to 78 mJ/cm2.


Keywords: indium-tin oxide, photoelectric effect, laser energy meter, excimer laser, thin films

References
 1.          Archambault J.L., Reekie L., Russell P.S. Excimer laser production of fiber Bragg gratings. Proc. SPIE, 1993, vol.2044, pp.69.doi:10.1117/12.165676
2.          The Digital Display Revolution: Built on Excimer Laser Annealing. Available at: http://www.coherent.co.jp/document/whitepaper/fpd/vyper_laser_annealing.pdf (accessed 20.02.2017).
3.          Sicard E., Boulmer-Leborgne C., Andreazza-Vignolle C., Frainais M.  Excimer laser surface treatment of aluminum alloy in nitrogen. Applied Physics A, 2001, vol. 73, pp. 55–60. doi: 10.1007/s003390100742
4.          Hourdakis G., Hontzopoulos E.I., Tsetsekou A., Zampetakis Th., Stournaras C.J. Excimer laser surface treatment of ceramics. Proc. SPIE,1991,vol. 1503, pp.249–255. doi:10.1117/12.46937
5.          Waugh D., Lawrence J. The enhancement of biomimetic apatite coatings by means of KrF excimer laser surface treatment of nylon 6,6 biopolymer by means of KrF excimer laser surface treatment. Lasers in Engineering,2011,vol.21, pp. 95–114.
6.          Bhatt D., Williams K., Hutt D.A., Conway P.P. Process optimisation and characterization of excimer laser drilling of microvias in glass. Proc. 9th Electronics Packaging Technology Conference. Singapore, 2007, pp. 196–201. doi: 10.1109/EPTC.2007.4469750
7.          Optics & Coatings 120 nm - 1064 nm. Available at: http://www.actonoptics.com/userfiles/files/Acton-Optics-Brochure-revD5-web.pdf (accessed 20.02.2017).
8.          Eximer Lasers & Optical Systems. Product Catalog. Available at: https://cohrcdn.azureedge.net/assets/pdf/COHR_ExcimerCatalog2016revC.pdf (accessed 20.02.2017).
9.          Measuring Laser Power and Energy Output. Available at: http://hank.uoregon.edu/experiments/modelocked-fiberlaser/aboutmeasuringlaserpowerndenergyoutputfinal.pdf (accessed 20.02.2017).
10.       Application Note. Pyroelectric Detectors. Available at: https://gentec-eo.com/Content/downloads/application-note/AN_202194_Photo_or_Pyro.pdf (accessed 20.02.2017).
11.       Odon A. Processing of signal of pyroelectric sensor in laser energy meter. Measurement Science Review,2001,vol. 1, no.1, pp. 215–218.
12.        Whatmore R.W. Piezoelectric and pyroelectric materials and their applications. In Electronic Materials. Eds. L.S. Miller, J.B. Mullen. Springer,1991,pp. 283–290. doi: 10.1007/978-1-4615-3818-9_19
13.       Odon A. Voltage response of pyroelectric PVDF detector to pulse source of optical radiation. Measurement Science Review,2005,vol. 5, sect. 3, pp. 55–58.
14.       Gondal M.A., Durrani S.M.A., Khawaja E.E., Laser pulse photodetectors based on Sn-dopes indium oxide films. European Physical Journal Applied Physics,1998,vol. 8, pp. 37–42. doi: 10.1051/epjap:1999227
15.       Meshkovskiy I.K., Plyastsov S.A. Photoelectric and photomagnetic response of indium-tin oxide films. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2015, vol. 15, no. 6, pp. 969–975. (In Russian) doi: 10.17586/2226-1494-2015-15-6-969-975
Sauli Z., Retnasamy V., Keng C.J., Palianysamy M., Kamarudin H. Reflectance analysis of sputtered indium tin oxide(ITO) using UV Lambda. Applied Mechanics and Materials, 2014, vol. 680, pp. 102–105. doi: 10.4028/www.scientific.net/AMM.680.102


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