doi: 10.17586/2226-1494-2017-17-2-256-262


I. K. Meshkovsky, S. A. Plyastsov

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For citation: Meshkovskiy I.K., Plyastsov S.A. Excimer laser pulse energy meter based on photoelectric response of indium-tin oxide films. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2017, vol. 17, no. 2, pp. 256–262 (in Russian). doi: 10.17586/2226-1494-2017-17-2-256-262


The paper deals with the problems of excimer laser pulse energy measurements. The goal of the current work is to research and develop the construction and characteristics of laser energy meter based on the photoelectric films of indium-tin oxide. Photoelectric voltage linearly depends on the laser pulse energy. We propose the construction and electric scheme of the energy meter. Comparison of the measurement results of photoelectric energy meter and pyroelectric energy meter is carried out. It is shown that the measurement error of photoelectric energy meter does not exceed the one for pyroelectric energy meter. Also it is found that photoelectric energy meter has several advantages: mechanical shock has no influence on the energy meter results, energy meter requires no zero level calibration, sensor temperature dependence is less than for pyroelectric meter. We measure the work energy diapason for the meter sensor element. It is shown that the surface degradation occurs under the irradiation with energy density equal to 78 mJ/cm2.

Keywords: indium-tin oxide, photoelectric effect, laser energy meter, excimer laser, thin films

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