doi: : 10.17586/2226-1494-2018-18-1-147-152


S. A. Galkina, M. A. Barulina

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For citation: Galkina S.A., Barulina M.A. Orthotropic direction effect on stress-strain state of temperature-perturbed sensing element of micromechanical accelerometer. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2018, vol. 18, no. 1, pp. 147–152 (in Russian). doi: 10.17586/2226-1494-2018-18-1-147-152


 The paper presents research results on effect of the orthotropic axe directions of orthotropic silicon on the stress-strain state of sensing micromechanical accelerometer element within the conditions of thermal agitations. We proposed a mathematical model of orthotropic thin plate for the case of disalignment of the coordinate axes and the material orthotropic direction of sensor sensitive element. We developed and verified software for studying the effect of misalignment of the coordinate axes and the orthotropic direction on the stress-strain state of the sensing element. The software is comparable with ANSYS software package with respect to accuracy of the simulation results. The developed software was used for computer simulation; the displacement field dependences of a uniformly heated sensing element on misalignment angle of coordinate axes and orthotropic direction were obtained. Computer simulation revealed the presence of direction misalignment of orthotropic axes and the coordinate axes, resulting in symmetry disruption in the plate deformation under uniform heating. As part of the study, we have shown a nonlinear character of the stress-strain state dependence of the temperature-perturbed sensor on the misalignment angle of orthotropic axe directions. It was demonstrated that the maximum deflection change for different misalignment angle values does not exceed 3.2% of the nominal value. However, under the conditions of external dynamic, thermal and mechanical exposures, the cumulative effect of the maximum deflection value change can have a significant impact on the characteristics of the micromechanical accelerometer. Therefore, it seems advisable to perform future research of the effect of misalignment of orthotropic axe directions on the parameters of the inertial information sensors.

Keywords: micromechanical sensor, micromechanical accelerometer, sensitive element, orthotropy, stress-strain state

Acknowledgements. The work is financially supported by the RSF grant 16-19-10290.


      1.      Peshekhonov V.G. Gyroscopic systems: current status and prospects. Gyroscopy and Navigation, 2011, vol. 2, no. 3, pp. 111–118. doi: 10.1134/S2075108711030096

2.      Dzhashitov V.E., Pankratov V.M. Sensors, Instruments and Systems of Aerospace and Marine Instrumentmaking in Terms of Thermal Effects. St. Petersburg, CNII Elektropribor Publ., 2005, 404 p. (In Russian)

3.      Raspopov V.Ya. Micromechanical Devices. Tula, TulSU Publ., 2002, 392 p. (In Russian)

4.      Hopcroft M.A., Nix W.D., Kenny T.W. What is the young’s modulus of silicon? Journal of Microelectromechanical Systems, 2010, vol. 19, no. 2, pp. 229–238. doi: 10.1109/jmems.2009.2039697

5.      Reddy J.N. Mechanics of Laminated Composite Plates and Shells. Theory and Analysis. 2nd ed. CRC Press, 2004, 831 р.

6.      Beeby S., Ensell G., Kraft M., White N. MEMS Mechanical Sensors. Norwood, Artech House, 2004, 281 p.

7.      Bandina M.A., Dzhashitov V.E., Pankratov V.M., Kalinin M.A., Papko A.A. Mathematical model of micromechanical accelerometer with consideration for temperature effects, thermoelastic deflected mode and dynamic effects. Gyroscopy and Navigation, 2008, no. 1, pp. 55–70. (In Russian)

8.      Connely I., Barbour N. et al. Manufacturing micromachined inertial sensor systems. Proc. 4th Int. Conf. on Integrated Navigation Systems. St. Petersburg, CSRI Elektropribor', 1997, part 1, pp. 362–370.

9.      Christensen R.M. Mechanics of cellular and other low-density materials. International Journal of Solids and Structures, 2000, vol. 37, no. 1-2, pp. 93–104. doi: 10.1016/s0020-7683(99)00080-3

10.   Golovanov A.P., Tyuleneva O.N., Shigabutdinov A.F. Finite Elements Method in Static and Dynamics of Thin-Walled Structures. Moscow, Fizmatlit Publ., 2009, 392 p. (In Russian)

11.   Cheng X., Xue W. Linear finite element approximations for the Timoshenko beam and the shallow arch problems. Journal of Computational Mathematics, 2002, vol. 20, no. 1,
pp. 15–22.

12.   Berzeri M., Shabana A.A. A Finite Element Study of the Geometric Centrifugal Stiffening Effect. Technical Report #MBS99-5-UIC. Chicago, University of Illinois, 1999.

13.   Rades M. Finite Element Analysis. Printech, 2006, 274 p.

14.   Greening P.D. Dynamic Finite Element Modelling and Updating of Loaded Structures. PhD Thesis. University of Bristol, UK, 1999.

15.   Alawadhi E.M. Finite Element Simulations Using ANSYS. CRC Press, 2010, 408 p.

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