DOI: 10.17586/2226-1494-2018-18-5-744-750


Y. M. Andreeva, M. M. Sergeev, U. E. Gabysheva, I. V. Shishkovsky

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Andreeva Ya.M., Sergeev M.M., Gabysheva U.E., Shishkovsky I.V. Formation of insulating barriers in silica porous films by CO2 laser writing. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2018, vol. 18, no. 5, pp. 744–750 (in Russian). doi: 10.17586/2226-1494-2018-18-5-744-750

The paper proposes the method of integral architecture formation for silica porous films used as solid-state media for different indicators. The formation of sells insulated from each other by barriers in the porous media is performed by direct laser writing using CO2laser source. We study the mechanism of laser induced modification of silica porous film with the thickness of 170±10 nm on glass substrate. We also estimate the laser processing parameters for the formation of barriers with the determined crater depth of 1.5±0.5 μm and beads height of 2.5±0.5 μm, the laser intensities in the range of q = 8.7–11.3 kW/cm2 and scanning speed of υ= 0.1-0.7 mm/s. The dependence of the laser track geometry on scanning speed and laser intensity is analyzed by optical microscopy and contact profilometry. The produced sells were impregnated with aqueous solution of copper (II) nitrate and rhodamine to demonstrate the efficiency of the insulating barriers. Looking ahead this technique can be applied for fabrication of thin film sensing devices containing different metal nanoparticles with unique optical properties.

Keywords: silica sol-gel films, insulating barriers, CO2 laser, thermal densification, metal nanoparticles

Acknowledgements. The reported study was funded by the RFBR according to the research project No. 17-32-50133 mol_nr

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