APPLICATION OF INDUCED MECHANICAL STRESSES IN FORMATION OF SPHERICAL SURFACES OF INTERFERENCE MIRROR SUBSTRATES

Lobanov P.Yu, Manuylovich I.S., Sidoryuk O.E., Semenov V.G. Application of induced mechanical stresses in formation of spherical surfaces of interference mirror substrates. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2020, vol. 20, no. 6, pp. 773-779 (in Russian). doi: 10.17586/2226-1494-2020-20-6-773-779

Subject of Research. The work deals with the technique for shaping of the polished substrate surfaces for interference mirrors of gas lasers, laser gyro sensors, in particular. The main attention is paid to the manufacture of parts from optical SO-115M sitall with a given curvature of the central zone and a flat surface of the peripheral ring, designed for installation on a laser resonator monoblock body by means of an optical contact. Method. The required shaping result was achieved by grinding and polishing of products in the presence of metered local mechanical stresses applied to the membrane in the central zone of the substrate. At this, the profile parameters were monitored using phase shifting interferometry technique. The experimental results were compared with the data of mathematical modeling by applying an engineering program for finite element analysis. Main Results. The main dependences of the curvature radii of spherical surfaces obtained in the technology under consideration are specified for various values of mechanical loads and geometric parameters of membranes. Particular attention is paid to consideration of the maximum stress values in the samples and their comparison with the ultimate strength characteristics of the material. It is shown that the considered technological approach can be effective in the manufacture of substrates for interference mirrors of gas laser resonators, including sensors of laser gyroscopes. In addition, the described technology can be used to manufacture aspherical substrate surfaces. Practical Relevance. The method considered provides for increase of the optical parts processing productivity in conditions of mass production.

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