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	Design of the microelectromechanical logic element based on a comb-drive resonator</div>

Alexander A. Solovev, Evgeny F. Pevtsov, Vladimir A. Kolchuzhin

2025 , VOLUME 25, NUMBER 3 ( may-june )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Nikiforov
Vladimir O.
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doi: 10.17586/2226-1494-2025-25-3-508-519

Design of the microelectromechanical logic element based on a comb-drive resonator

S. A. Alexander, E. F. Pevtsov, V. A. Kolchuzhin

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Article in Russian

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Solovev A.A., Pevtsov E.F., Kolchuzhin V.A. Design of the microelectromechanical logic element based on a comb-drive resonator. Scientific and Technical Journal of Information Technologies, Mechanics and Optics, 2025, vol. 25, no. 3, pp. 508–519 (in Russian). doi: 10.17586/2226-1494-2025-25-3-508-519

Abstract

CMOS technology has nearly reached the physical limits of transistor scaling and exhibits significant operational limitations at extreme temperatures and ionizing radiation. This work proposes a methodology for designing logic elements based on an alternative technology utilizing comb-drive microelectromechanical resonators operating on a non-contact principle and reconfigurable during operation. A method is proposed for calculating the geometric parameters of the device using analytical expressions and considering technological norms necessary to achieve specified characteristics: the natural frequency of resonator oscillations (100 kHz) and the quality factor (20) at atmospheric pressure. Optimal geometric parameters of the device, characteristics of capacitive cells affecting the sensitivity of the device and the quality factor, taking into account air damping, are determined. The accuracy of the calculations is sufficient for designing photomasks without using specialized software. A compact model of a logic microelectromechanical element has been developed, allowing for system analysis of dynamic characteristics and implementation of a functionally complete set of logic operations. The developed design flow can be applied to create logic microelectromechanical elements with the possibility of reprogramming during operation and further cascading of such devices for constructing complex digital circuits. The article is useful for developers of microelectromechanical accelerometers and gyroscopes and proposes an alternative approach to creating three-dimensional models based on a library of parametric components and generating compact models for system analysis.

Keywords: MEMS, micro-electro-mechanical systems resonators, logic gates, system-level modeling, NOR gate, XOR gate

Acknowledgements. This work was supported by the Ministry of Science and Higher Education of the Russian Federation (State Assignment for Universities No. ФГФЗ-2023-0005) and carried out using equipment of the Shared Equipment Center of RTU MIREA (Agreement No. 075-15-2021-689 dated 01.09.2021, unique identification number 2296.61321Х0010).

References

Nanaiah K.C., Younis M.I. Dual electro-mechanical oscillator for dynamically reprogrammable logic gate. Patent US11031937B2, 2021.
Hafiz M.A.A., Kosuru L., Younis M.I. Microelectromechanical reprogrammable logic device. Nature Communications, 2016, vol. 7, pp. 11137. https://doi.org/10.1038/ncomms11137
Fariborzi H., Chen F., Nathanael R., Chen I-Ru, Hutin L., Lee R., Liu T.-J.K., Stojanovic V. Relays do not leak – CMOS does. Proc. of the 50^th ACM/EDAC/IEEE Design Automation Conference (DAC), 2013, pp. 1–4.
Ilyas S., Ahmed S., Hafiz A.A.,Fariborzi H., Younis M. Cascadable microelectromechanical resonator logic gate. Journal of Micromechanics and Microengineering, 2019, vol. 29, no. 1, pp. 015007. https://doi.org/10.1088/1361-6439/aaf0e6
Ilyas S., Hafiz M.A.A., FariborziH., Younis M.I. Mechanical resonator based cascadable logic device. Patent US20190341920A1, 2021.
Solovev A.A., Pevtsov E.F., Kolchuzhin V.A. System modeling of a multi-contact microelectromechanical logic element. Nano- and Microsystems Technology, 2024, vol. 26, no. 6, pp. 260–267. (in Russian)
Asselot J., Krust A., Parent A., Welham C. High order MEMS models for system design. Proc. of the IEEE International Symposium on Circuits and Systems (ISCAS), 2018, pp. 1–5. https://doi.org/10.1109/iscas.2018.8351644
Gridchin A.V., Kolchuzhin V.A., Gridchin V.A. An optimization of initial gap in electrostatic comb drive. Proc. of the 13^th International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE), 2016, pp. 13–15. https://doi.org/10.1109/APEIE.2016.7802182
Senturia S.D. Microsystem Design. Springer,2005. 689 p.
Parker G.W. What is the capacitance of parallel plates? Computers in Physics, 1991, vol. 5, pp. 534–540. https://doi.org/10.1063/1.4823017
Maj C., Nazdrowicz J., Stawiński A. Fringing field modelling in MEMS capacitive comb-drive accelerometers. Methods and tools in CAD – selected issues, 2021, pp. 15–27. https://doi.org/10.24427/978-83-66391-87-1_02
Yazdi N., Najafi K., Salian A. A high-sensitivity silicon accelerometer with a folded-electrode structure. Journal of Microelectromechanical Systems, 2003, vol. 12, no. 4, pp. 479–486. https://doi.org/10.1109/JMEMS.2003.815837
Veijola T., Turowski M. Compact damping models for laterally moving microstructures with gas-rarefaction effects. Journal of Microelectromechanical Systems, 2001,vol. 10,no. 2,pp. 263–273. https://doi.org/10.1109/84.925777
Kolchuzhin V.A., Solovev A.A., Pevtcov E.F. Program for analytical calculation of geometric dimensions of logical MEMS gates based on comb resonators. Certificate of the State computer program registration RU 2024682380. 2024. (in Russian)
Schröpfer G., Lorenz G., Krust A., Vernay B., Breit S., Mehdaoui A., Sanginario A. MEMS system-level modeling and simulation in smart systems. Smart Systems Integration and Simulation, 2016, pp. 145–168. https://doi.org/10.1007/978-3-319-27392-1_6
Lorenz G., Morris A., Lakkis I. A top-down design flow for MOEMS. Proceedings of SPIE, 2001, vol. 4408,pp. 126–137. https://doi.org/10.1117/12.425351
Zhang Z., Kamon M., Daniel L. Continuation-based pull-in and lift-off simulation algorithms for microelectromechanical devices. Journal of Microelectromechanical Systems, 2014, vol. 23, no. 5, pp. 1084–1093. https://doi.org/10.1109/jmems.2014.2304967
Lorenz G., Schröpfer G. 3D parametric-library-based MEMS/IC design. System-Level Modeling of MEMS, 2013, pp. 407–424. https://doi.org/10.1002/9783527647132.ch17
Haase J.,Reitz S.,Wünsche S., Schwarz P.,Becker U.,Lorenz G.,Neul R. Netzwerk- und Verhaltensmodellierung eines mikromechanischen Beschleunigungssensors.
Proc. of the Workshop Methoden und Werkzeuge zum Entwurf von Mikrosystemen im Rahmen des 2. Statusseminars zum BMBF-Verbundprojekt Modellbildung für die Mikrosystemtechnik MIMOSYS, 1997, pp. 23–30.(in German)
Neul R., Becker U., Lorenz G., Schwarz P., Haase J., WünscheS. A modeling approach to include mechanical microsystem components into the system simulation. Proc. of the Proceedings Design, Automation and Test in Europe, 1998, pp. 510–517. https://doi.org/10.1109/DATE.1998.655906
Kolchuzhin V., Dotzel W., Mehner J. Challenges in MEMS parametric macro-modeling based on mode superposition technique. Proc. of the 10^th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE, 2009, pp. 1–4. https://doi.org/10.1109/ESIME.2009.4938481
Kolchuzhin V. Verilog-A_components. Available at: https://github.com/Kolchuzhin/Verilog-A_components/tree/main/MIREA (accessed: 06.02.2025).

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