THIN METAL FILMS STRUCTURE RESEARCH AFTER FEMTOSECOND LASER RECORDING

Veiko Vadim Pavlovich, Baranov Alexander Vasilievich, Michail Yarchuk, Alexander Ivanov, Kiril Bogdanov

2010 , VOLUME 10, NUMBER 5 ( SEPTEMBER-OCTOBER )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Editor-in-Chief

Nikiforov
Vladimir O.
D.Sc., Prof.

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THIN METAL FILMS STRUCTURE RESEARCH AFTER FEMTOSECOND LASER RECORDING

V. P. Veiko, A. V. Baranov, M. Yarchuk, A. Ivanov, K. Bogdanov

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Abstract

Thermochemical method of thin Cr films modification by laser pulses of super short width is considered.
Illumination modes till exhalation are examined. Illuminated areas in the atmosphere and vacuum steady for
etching are obtained. Structural and chemical composition of illuminated areas is determined. The most
technological mode of Cr modification is selected increasing the method resolution.

Keywords: surface modification, thin Cr films, femtosecond laser, chromium oxides, Raman spectroscopy

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