Author Zhadin Alexander V. Journal Scientific and Technical Of Information Technologies, Mechanics and Optics

2024 , VOLUME 24, NUMBER 2 ( march-april )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Nikiforov
Vladimir O.
D.Sc., Prof.

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Zhadin Alexander V.

Work place: ITMO University, Saint Petersburg, 197101, Russian Federation
Post: student
E-mail: alexsander_zhadin@mail.ru

Ivanova T. V., Zhadin A. V. "SIMULATED ANNEALING" ALGORITHM FOR LIGHT SOURCE PARAMETRIC OPTIMIZATION IN PHOTOLITHOGRAPHY
The article was published in issue 2, volume 17, 2017

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