Vtorushin Sergey E.

Work place: Tomsk State University of Control Systems and Radioelectronics, Tomsk, 634050, Russian Federation
Post: Scientific Researcher
E-mail: sergei.e.vtorushin@tusur.ru
Scopus ID: 56669651800
ORCID: 0009-0008-9407-9552
Vtorushin S. E., Talovskaia A. A., Barbin E. S., Kulinich I. V., Vaisbekker M. S.

Optimization of the resonant frequency MEMS pressure sensor based on numerical simulation


The article was published in issue 6, volume 25, 2025
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Scientific and Technical Journal
of Information Technologies, Mechanics and Optics.

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