DEVELOPMENT OF SMALL-SIZE SHOCK BENCH FOR MEMS TESTING

Eliseev Daniil P , Valentin Serebryakov, Aleksey Chapurskiy

2011 , VOLUME 11, NUMBER 4 ( JULY-AUGUST )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Vladimir O.
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DEVELOPMENT OF SMALL-SIZE SHOCK BENCH FOR MEMS TESTING

D. P. Eliseev, V. Serebryakov, A. Chapurskiy

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Abstract

Development capability of small-size shock bench for MEMS testing on resistance to high impacts (thousands of G’s) has been justified; selection methods of fundamental and structural solutions have been designed. General features of developed bench have been calculated and ability to reach acceleration over than 10000 G on relatively low-speed collisions with acceptable impulse duration has been proved. Preliminary computations have shown that limits expansion of measured bench parameters and structure optimization could sufficiently increase level of reproduced acceleration in 3-4 times.

Keywords: micromechanical gyro, impact, bench, acceleration

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