micro- and nanostructures, microfluid chip, ion lithography, magnetron sputtering, electron microscopy, ion microscopy " />

2010 , VOLUME 10, NUMBER 4 ( JULY-AUGUST )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Nikiforov
Vladimir O.
D.Sc., Prof.

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ION LITHOGRAPHY APPLICATION FOR NANOSCALE CHANNEL FORMATION IN GLASS MICROFLUID CHIPS

A. Evstrapov, I. Mukhin, I. V. Kukhtevich, A. Bukatin

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Abstract

Etching processes of K8 glass with gold, carbon and chrome coatings are investigated. It is shown that the

minimal reproducible size of focused ion etching micro channel is 40 nm. Experimental microfluid chip

prototype with nanochannels for biological probes fixation and investigation are obtained.

Keywords: micro- and nanostructures, microfluid chip, ion lithography, magnetron sputtering, electron microscopy, ion microscopy

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