Author Nikulina Ekaterina A. Journal Scientific and Technical Of Information Technologies, Mechanics and Optics

2024 , VOLUME 24, NUMBER 2 ( march-april )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Nikiforov
Vladimir O.
D.Sc., Prof.

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Nikulina Ekaterina A.

Work place: ITMO University, Saint Petersburg, 197101, Russian Federation
Post: postgraduate
E-mail: katerina.nikulina@gmail.com

Nikulina E. A., Zverev V. A. STUDY OF BIREFRINGENCE INFLUENCE ON IMAGE QUALITY OF PHOTOLITHOGRAPHY SYSTEMS IN VIEW OF PARTIALLY-COHERENT LIGHT SOURCE
The article was published in issue 2, volume 15, 2015

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