Author Thomas Lijo Journal Scientific and Technical Of Information Technologies, Mechanics and Optics

2024 , VOLUME 24, NUMBER 6 ( november-december )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Nikiforov
Vladimir O.
D.Sc., Prof.

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Thomas Lijo

Work place: Research Scientist , Centre de recherche CERVO-Universite Laval, Quebec, G1J 2G3, Canada
Post: научный сотрудник
Degree: PhD
E-mail: lijothomas465@gmail.com
ORCID: 0000-0002-9490-8903

Zoric N., Thomas L., Smirnova I. G.

OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVE

The article was published in issue 6, volume 19, 2019

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