Menu
Publications
2024
2023
2022
2021
2020
2019
2018
2017
2016
2015
2014
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
Editor-in-Chief
Nikiforov
Vladimir O.
D.Sc., Prof.
Partners
Thomas Lijo
Work place: Research Scientist , Centre de recherche CERVO-Universite Laval, Quebec, G1J 2G3, Canada
Post: научный сотрудник
Degree: PhD
E-mail: lijothomas465@gmail.com
ORCID: 0000-0002-9490-8903
Post: научный сотрудник
Degree: PhD
E-mail: lijothomas465@gmail.com
ORCID: 0000-0002-9490-8903
Zoric N., Thomas L., Smirnova I. G.
The article was published in issue 6, volume 19, 2019
OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVE
The article was published in issue 6, volume 19, 2019