Author Nikita S. Karanin Journal Scientific and Technical Of Information Technologies, Mechanics and Optics

2025 , VOLUME 25, NUMBER 3 ( june )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Editor-in-Chief

Nikiforov
Vladimir O.
D.Sc., Prof.

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Karanin Nikita S.

Work place: Concern CSRI Electropribor, JSC, Saint Petersburg, 197046, Russian Federation; ITMO University, Saint Petersburg, 197101, Russian Federation
Post: Process Engineer
E-mail: karanin.ns@gmail.com
ORCID: 0009-0007-5086-0833

Karanin N. S.

Investigation of geometric parameters of silicon structures in device layer during manufacture of sensitive elements of micromechanical accelerometers

The article was published in issue 2, volume 25, 2025

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