2010 , VOLUME 10, NUMBER 5 ( SEPTEMBER-OCTOBER )

ISSN 2226-1494 (print), ISSN 2500-0373 (online)

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Nikiforov
Vladimir O.
D.Sc., Prof.

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DEFECTS INVESTIGATION OF SI/SIO2 SYSTEM FORCED BY LASER IRRADIATION

O. V. Kuznetsova, Q. T. Pham, R. Khalestkiy

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Abstract

Investigation results of laser irradiation influence on structural properties of silicon-thermal oxide system are shown in this article.

Keywords: laser irradiation, silicon nanocluster, Si/SiO2 system

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