Nikulina Ekaterina A.

Work place: ITMO University, Saint Petersburg, 197101, Russian Federation
Post: postgraduate
E-mail: katerina.nikulina@gmail.com
Nikulina E. A., Zverev V. A. STUDY OF BIREFRINGENCE INFLUENCE ON IMAGE QUALITY OF PHOTOLITHOGRAPHY SYSTEMS IN VIEW OF PARTIALLY-COHERENT LIGHT SOURCE
The article was published in issue 2, volume 15, 2015
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