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Editor-in-Chief
Nikiforov
Vladimir O.
D.Sc., Prof.
Partners
Skvortsov Albert Matveevich
Work place: ITMO University, 197101, Saint Petersburg, Russian Federation
Post: Professor
Degree: D.Sc., Professor
E-mail: a-skvortsov@yandex.ru
Post: Professor
Degree: D.Sc., Professor
E-mail: a-skvortsov@yandex.ru
Khalestkiy R., Skvortsov A. M., Семенов А. Е., Новиков С. Н., Фролкова Е. Г. Исследование структурных дефектов межслойной изоляции в КМОП ИС
The article was published in issue 4, volume 03, 2003
The article was published in issue 4, volume 03, 2003
Фролкова Е. Г., Khalestkiy R., Skvortsov A. M., Семенов А. Е., Новиков С. Н. Исследование пробивных напряжений межслойной изоляции в КМОП ИС
The article was published in issue 4, volume 03, 2003
The article was published in issue 4, volume 03, 2003
Khalestkiy R., Skvortsov A. M., Семенов А. М. Исследование структур типа Siп/к -SiO2-Si с окислами, полученными в различных режимах окисления
The article was published in issue 4, volume 03, 2003
The article was published in issue 4, volume 03, 2003
Семенов А. М., Khalestkiy R., Skvortsov A. M. Исследование МОП-структур с окислами, полученными при различных режимах окисления
The article was published in issue 4, volume 03, 2003
The article was published in issue 4, volume 03, 2003
Skvortsov A. M., Стройков И. И. ИССЛЕДОВАНИЕ НАНОКОМПОЗИТНЫХ СТРУКТУР НА ОСНОВЕ КРЕМНИЯ И ФОСФАТНОГО СТЕКЛА НА КРЕМНИЕВЫХ ПОДЛОЖКАХ
The article was published in issue 6, volume 08, 2008
The article was published in issue 6, volume 08, 2008
Skvortsov A. M., Пилюгина Ю. А., Tolmachov V. Химическое микроструктурирование поверхности монокристаллического кремния
The article was published in issue 3, volume 04, 2004
The article was published in issue 3, volume 04, 2004
Veiko V. P., Дышловенко С. С., Пилюгина Ю. А., Skvortsov A. M. Микроструктурирование поверхности кремниевых пластин с помощью лазера
The article was published in issue 3, volume 04, 2004
The article was published in issue 3, volume 04, 2004
Skvortsov A. M., Veiko V. P., Huynh Cong Tu PULSED FIBER LASER APPLICATION FOR SIO2/SI SYSTEM MICROSTRUCTURING
The article was published in issue 5, volume 12, 2012
The article was published in issue 5, volume 12, 2012
Skvortsov A. M. Структурирование поверхности монокристаллов кремния в
электронной технике
The article was published in issue 4, volume 05, 2005
The article was published in issue 4, volume 05, 2005
Skvortsov A. M., Khalestkiy R. Некоторые особенности деградации
МОП-структур под действием γ-излучения
The article was published in issue 4, volume 05, 2005
The article was published in issue 4, volume 05, 2005
Skvortsov A. M., Sokolov V., Khalestkiy R. Исследование гистерезиса
вольт-емкостных характеристик структур кремний-окисел с поликремниевым
затвором при воздействии ионизирующего излучения
The article was published in issue 9, volume 06, 2006
The article was published in issue 9, volume 06, 2006
Skvortsov A. M., Sokolov V., Khalestkiy R., Смирнов Ю. В. Деградация структур
Si-SiO2 с поликремниевым затвором при гамма-облучении в зависимости
от напряжения смещения
The article was published in issue 9, volume 06, 2006
The article was published in issue 9, volume 06, 2006
Tkalich V. L., Gatchin Y. A., Korobeynikov A. G., Papchenko B. P., Skvortsov A. M. Программно-
аппаратный комплекс производственно-технологического контроля качества
микро- и наноэлементной базы электроники
The article was published in issue 9, volume 06, 2006
The article was published in issue 9, volume 06, 2006
Skvortsov A. M., Khalestkiy R., Huynh Cong Tu EFFECT OF LASER MICRO STRUCTURING PROCESS ON ELECTROPHYSICAL PROPERTIES OF SIO2/SI SYSTEM
The article was published in issue 1, volume 13, 2013
The article was published in issue 1, volume 13, 2013
Skvortsov A. M., Huynh Cong Tu, Khalestkiy R. MICROSTRUCTURING MECHANISM OF SiO2/Si SYSTEM UNDER IRRADIATION BY A SCANNING PULSED FIBER LASER BEAM
The article was published in issue 3, volume 13, 2013
The article was published in issue 3, volume 13, 2013
Veiko V. P., Skvortsov A. M., Huynh Cong Tu, Petrov A. A. LASER ABLATION OF MONOCRYSTALLINE SILICON
UNDER PULSED-FREQUENCY FIBER LASER
The article was published in issue 3, volume 15, 2015
The article was published in issue 3, volume 15, 2015
Skvortsov A. M., Trifonova T. A., Huynh Cong Tu MICROSTRUCTURING OF SILICON SINGLE CRYSTALS BY FIBER LASER IN HIGH-SPEED SCANNING MODE
The article was published in issue 6, volume 15, 2015
The article was published in issue 6, volume 15, 2015